Semiconductor Manufacturing

Fundamentals Of Semiconductor Manufacturing and Process Control

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Penilaian

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Fundamentols of Semiconductor Monufocturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM s)rstems. Readers are introduced to both the theory and practice of all basic manufacturing concepts. Fo[lowing an overview of manufacturing and technology, the text explores process monitoring methods, including those that focus on product wafers and those that focus on the equipment used to produce wafers. Next, the text sets forth some fundamentals of statistics and yield modeling, which set the foundation for a detailed discussion of how statistical process control is used to analyze quality and improve yields. The discussion of statisticaI experimental design offers readers a powerful approach for systematically varying controllable process conditions and determining their impact on output parameters that measure quality. The authors introduce process modeling concepts, including several advanced process control topics such as run-by-run, supervisory control, and process and equipment diagnosis. Critical coveraSe includes the fo[[owing: @ Combines process control and semiconductor manufacturing € Unique treatment of system and software technology and manatement of overall manufacturint systems @ Chapters include case studies, sample problems, and suggested exercises o lnstructor support includes electronic copies of the figures and an instructori manual Graduate-level students and industrial practitioners will benefit from the detailed examination of how electronic materials and supplies are converted into finished integrated circuits and electronic products in a high-volume manufacturing environment.

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Availability

Detail Information

Series Title

NULL

Call Number

May-621.381.52-f

Publisher

: ., 2006

Collation

xix + 463 hlm, 1 Jil. : 23 cm.

Language

Indonesia

ISBN/ISSN

0-471-78406-0

Classification

Semiconductor Manufacturing

Content Type

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Media Type

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Carrier Type

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Edition

I

Subject(s)

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Specific Detail Info

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Statement of Responsibility

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